Obj Sampling µm/pix Z Step (µm) LCT 4x Full (2048 x 2048) 1.799805 2 X Y Z Laser Side Exposure 093130 045810 -900 1 0 2 093130 045810 -300 1 0 2 093130 045810 300 1 0 2 093130 045810 900 1 0 2 093130 045810 1500 1 0 2 093130 045810 2100 1 0 2 093130 045810 2700 1 0 2 093130 045810 -900 0 0 2 093130 045810 -300 0 0 2 093130 045810 300 0 0 2 093130 045810 900 0 0 2 093130 045810 1500 0 0 2 093130 045810 2100 0 0 2 093130 045810 2700 0 0 2 126300 045810 -900 1 0 2 126300 045810 -300 1 0 2 126300 045810 300 1 0 2 126300 045810 900 1 0 2 126300 045810 1500 1 0 2 126300 045810 2100 1 0 2 126300 045810 2700 1 0 2 126300 045810 -900 0 0 2 126300 045810 -300 0 0 2 126300 045810 300 0 0 2 126300 045810 900 0 0 2 126300 045810 1500 0 0 2 126300 045810 2100 0 0 2 126300 045810 2700 0 0 2 159470 045810 -900 1 1 2 159470 045810 -300 1 1 2 159470 045810 300 1 1 2 159470 045810 900 1 1 2 159470 045810 1500 1 1 2 159470 045810 2100 1 1 2 159470 045810 2700 1 1 2 159470 045810 -900 0 1 2 159470 045810 -300 0 1 2 159470 045810 300 0 1 2 159470 045810 900 0 1 2 159470 045810 1500 0 1 2 159470 045810 2100 0 1 2 159470 045810 2700 0 1 2 192640 045810 -900 1 1 2 192640 045810 -300 1 1 2 192640 045810 300 1 1 2 192640 045810 900 1 1 2 192640 045810 1500 1 1 2 192640 045810 2100 1 1 2 192640 045810 2700 1 1 2 192640 045810 -900 0 1 2 192640 045810 -300 0 1 2 192640 045810 300 0 1 2 192640 045810 900 0 1 2 192640 045810 1500 0 1 2 192640 045810 2100 0 1 2 192640 045810 2700 0 1 2 093130 078980 -900 1 0 2 093130 078980 -300 1 0 2 093130 078980 300 1 0 2 093130 078980 900 1 0 2 093130 078980 1500 1 0 2 093130 078980 2100 1 0 2 093130 078980 2700 1 0 2 093130 078980 -900 0 0 2 093130 078980 -300 0 0 2 093130 078980 300 0 0 2 093130 078980 900 0 0 2 093130 078980 1500 0 0 2 093130 078980 2100 0 0 2 093130 078980 2700 0 0 2 126300 078980 -900 1 0 2 126300 078980 -300 1 0 2 126300 078980 300 1 0 2 126300 078980 900 1 0 2 126300 078980 1500 1 0 2 126300 078980 2100 1 0 2 126300 078980 2700 1 0 2 126300 078980 -900 0 0 2 126300 078980 -300 0 0 2 126300 078980 300 0 0 2 126300 078980 900 0 0 2 126300 078980 1500 0 0 2 126300 078980 2100 0 0 2 126300 078980 2700 0 0 2 159470 078980 -900 1 1 2 159470 078980 -300 1 1 2 159470 078980 300 1 1 2 159470 078980 900 1 1 2 159470 078980 1500 1 1 2 159470 078980 2100 1 1 2 159470 078980 2700 1 1 2 159470 078980 -900 0 1 2 159470 078980 -300 0 1 2 159470 078980 300 0 1 2 159470 078980 900 0 1 2 159470 078980 1500 0 1 2 159470 078980 2100 0 1 2 159470 078980 2700 0 1 2 192640 078980 -900 1 1 2 192640 078980 -300 1 1 2 192640 078980 300 1 1 2 192640 078980 900 1 1 2 192640 078980 1500 1 1 2 192640 078980 2100 1 1 2 192640 078980 2700 1 1 2 192640 078980 -900 0 1 2 192640 078980 -300 0 1 2 192640 078980 300 0 1 2 192640 078980 900 0 1 2 192640 078980 1500 0 1 2 192640 078980 2100 0 1 2 192640 078980 2700 0 1 2 093130 112150 -900 1 0 2 093130 112150 -300 1 0 2 093130 112150 300 1 0 2 093130 112150 900 1 0 2 093130 112150 1500 1 0 2 093130 112150 2100 1 0 2 093130 112150 2700 1 0 2 093130 112150 -900 0 0 2 093130 112150 -300 0 0 2 093130 112150 300 0 0 2 093130 112150 900 0 0 2 093130 112150 1500 0 0 2 093130 112150 2100 0 0 2 093130 112150 2700 0 0 2 126300 112150 -900 1 0 2 126300 112150 -300 1 0 2 126300 112150 300 1 0 2 126300 112150 900 1 0 2 126300 112150 1500 1 0 2 126300 112150 2100 1 0 2 126300 112150 2700 1 0 2 126300 112150 -900 0 0 2 126300 112150 -300 0 0 2 126300 112150 300 0 0 2 126300 112150 900 0 0 2 126300 112150 1500 0 0 2 126300 112150 2100 0 0 2 126300 112150 2700 0 0 2 159470 112150 -900 1 1 2 159470 112150 -300 1 1 2 159470 112150 300 1 1 2 159470 112150 900 1 1 2 159470 112150 1500 1 1 2 159470 112150 2100 1 1 2 159470 112150 2700 1 1 2 159470 112150 -900 0 1 2 159470 112150 -300 0 1 2 159470 112150 300 0 1 2 159470 112150 900 0 1 2 159470 112150 1500 0 1 2 159470 112150 2100 0 1 2 159470 112150 2700 0 1 2 192640 112150 -900 1 1 2 192640 112150 -300 1 1 2 192640 112150 300 1 1 2 192640 112150 900 1 1 2 192640 112150 1500 1 1 2 192640 112150 2100 1 1 2 192640 112150 2700 1 1 2 192640 112150 -900 0 1 2 192640 112150 -300 0 1 2 192640 112150 300 0 1 2 192640 112150 900 0 1 2 192640 112150 1500 0 1 2 192640 112150 2100 0 1 2 192640 112150 2700 0 1 2 093130 145320 -900 1 0 2 093130 145320 -300 1 0 2 093130 145320 300 1 0 2 093130 145320 900 1 0 2 093130 145320 1500 1 0 2 093130 145320 2100 1 0 2 093130 145320 2700 1 0 2 093130 145320 -900 0 0 2 093130 145320 -300 0 0 2 093130 145320 300 0 0 2 093130 145320 900 0 0 2 093130 145320 1500 0 0 2 093130 145320 2100 0 0 2 093130 145320 2700 0 0 2 126300 145320 -900 1 0 2 126300 145320 -300 1 0 2 126300 145320 300 1 0 2 126300 145320 900 1 0 2 126300 145320 1500 1 0 2 126300 145320 2100 1 0 2 126300 145320 2700 1 0 2 126300 145320 -900 0 0 2 126300 145320 -300 0 0 2 126300 145320 300 0 0 2 126300 145320 900 0 0 2 126300 145320 1500 0 0 2 126300 145320 2100 0 0 2 126300 145320 2700 0 0 2 159470 145320 -900 1 1 2 159470 145320 -300 1 1 2 159470 145320 300 1 1 2 159470 145320 900 1 1 2 159470 145320 1500 1 1 2 159470 145320 2100 1 1 2 159470 145320 2700 1 1 2 159470 145320 -900 0 1 2 159470 145320 -300 0 1 2 159470 145320 300 0 1 2 159470 145320 900 0 1 2 159470 145320 1500 0 1 2 159470 145320 2100 0 1 2 159470 145320 2700 0 1 2 192640 145320 -900 1 1 2 192640 145320 -300 1 1 2 192640 145320 300 1 1 2 192640 145320 900 1 1 2 192640 145320 1500 1 1 2 192640 145320 2100 1 1 2 192640 145320 2700 1 1 2 192640 145320 -900 0 1 2 192640 145320 -300 0 1 2 192640 145320 300 0 1 2 192640 145320 900 0 1 2 192640 145320 1500 0 1 2 192640 145320 2100 0 1 2 192640 145320 2700 0 1 2 093130 178490 -900 1 0 2 093130 178490 -300 1 0 2 093130 178490 300 1 0 2 093130 178490 900 1 0 2 093130 178490 1500 1 0 2 093130 178490 2100 1 0 2 093130 178490 2700 1 0 2 093130 178490 -900 0 0 2 093130 178490 -300 0 0 2 093130 178490 300 0 0 2 093130 178490 900 0 0 2 093130 178490 1500 0 0 2 093130 178490 2100 0 0 2 093130 178490 2700 0 0 2 126300 178490 -900 1 0 2 126300 178490 -300 1 0 2 126300 178490 300 1 0 2 126300 178490 900 1 0 2 126300 178490 1500 1 0 2 126300 178490 2100 1 0 2 126300 178490 2700 1 0 2 126300 178490 -900 0 0 2 126300 178490 -300 0 0 2 126300 178490 300 0 0 2 126300 178490 900 0 0 2 126300 178490 1500 0 0 2 126300 178490 2100 0 0 2 126300 178490 2700 0 0 2 159470 178490 -900 1 1 2 159470 178490 -300 1 1 2 159470 178490 300 1 1 2 159470 178490 900 1 1 2 159470 178490 1500 1 1 2 159470 178490 2100 1 1 2 159470 178490 2700 1 1 2 159470 178490 -900 0 1 2 159470 178490 -300 0 1 2 159470 178490 300 0 1 2 159470 178490 900 0 1 2 159470 178490 1500 0 1 2 159470 178490 2100 0 1 2 159470 178490 2700 0 1 2 192640 178490 -900 1 1 2 192640 178490 -300 1 1 2 192640 178490 300 1 1 2 192640 178490 900 1 1 2 192640 178490 1500 1 1 2 192640 178490 2100 1 1 2 192640 178490 2700 1 1 2 192640 178490 -900 0 1 2 192640 178490 -300 0 1 2 192640 178490 300 0 1 2 192640 178490 900 0 1 2 192640 178490 1500 0 1 2 192640 178490 2100 0 1 2 192640 178490 2700 0 1 2 093130 211660 -900 1 0 2 093130 211660 -300 1 0 2 093130 211660 300 1 0 2 093130 211660 900 1 0 2 093130 211660 1500 1 0 2 093130 211660 2100 1 0 2 093130 211660 2700 1 0 2 093130 211660 -900 0 0 2 093130 211660 -300 0 0 2 093130 211660 300 0 0 2 093130 211660 900 0 0 2 093130 211660 1500 0 0 2 093130 211660 2100 0 0 2 093130 211660 2700 0 0 2 126300 211660 -900 1 0 2 126300 211660 -300 1 0 2 126300 211660 300 1 0 2 126300 211660 900 1 0 2 126300 211660 1500 1 0 2 126300 211660 2100 1 0 2 126300 211660 2700 1 0 2 126300 211660 -900 0 0 2 126300 211660 -300 0 0 2 126300 211660 300 0 0 2 126300 211660 900 0 0 2 126300 211660 1500 0 0 2 126300 211660 2100 0 0 2 126300 211660 2700 0 0 2 159470 211660 -900 1 1 2 159470 211660 -300 1 1 2 159470 211660 300 1 1 2 159470 211660 900 1 1 2 159470 211660 1500 1 1 2 159470 211660 2100 1 1 2 159470 211660 2700 1 1 2 159470 211660 -900 0 1 2 159470 211660 -300 0 1 2 159470 211660 300 0 1 2 159470 211660 900 0 1 2 159470 211660 1500 0 1 2 159470 211660 2100 0 1 2 159470 211660 2700 0 1 2 192640 211660 -900 1 1 2 192640 211660 -300 1 1 2 192640 211660 300 1 1 2 192640 211660 900 1 1 2 192640 211660 1500 1 1 2 192640 211660 2100 1 1 2 192640 211660 2700 1 1 2 192640 211660 -900 0 1 2 192640 211660 -300 0 1 2 192640 211660 300 0 1 2 192640 211660 900 0 1 2 192640 211660 1500 0 1 2 192640 211660 2100 0 1 2 192640 211660 2700 0 1 2