Obj	V_Res	µm/pix	Z step (µm)	Scanning	Sampling	Destripe
LCT 4x	1600	1.873	5	Fast	1/1	N/A/0
Wavelength	Power L	Power R				
488	70.00	70.00				
561	8.00	8.00				
642	50.00	50.00				
	20.00	20.00				
X	Y	Z	Laser	Side	Exposure	Skip
125200	079770	2990	488	0	2	1
125200	079770	3590	488	0	2	1
125200	079770	4190	488	0	2	1
125200	079770	4790	488	0	2	1
125200	079770	5390	488	0	2	1
125200	079770	5990	488	0	2	1
125200	079770	6590	488	0	2	1
125200	079770	7190	488	0	2	1
125200	079770	7790	488	0	2	1
125200	079770	8390	488	0	2	1
125200	079770	8990	488	0	2	1
125200	079770	2990	561	0	2	1
125200	079770	3590	561	0	2	1
125200	079770	4190	561	0	2	1
125200	079770	4790	561	0	2	1
125200	079770	5390	561	0	2	1
125200	079770	5990	561	0	2	1
125200	079770	6590	561	0	2	1
125200	079770	7190	561	0	2	1
125200	079770	7790	561	0	2	1
125200	079770	8390	561	0	2	1
125200	079770	8990	561	0	2	1
125200	079770	2990	642	0	2	1
125200	079770	3590	642	0	2	1
125200	079770	4190	642	0	2	1
125200	079770	4790	642	0	2	1
125200	079770	5390	642	0	2	1
125200	079770	5990	642	0	2	1
125200	079770	6590	642	0	2	1
125200	079770	7190	642	0	2	1
125200	079770	7790	642	0	2	1
125200	079770	8390	642	0	2	1
125200	079770	8990	642	0	2	1
158910	079770	2990	488	1	2	1
158910	079770	3590	488	1	2	1
158910	079770	4190	488	1	2	1
158910	079770	4790	488	1	2	1
158910	079770	5390	488	1	2	1
158910	079770	5990	488	1	2	1
158910	079770	6590	488	1	2	1
158910	079770	7190	488	1	2	1
158910	079770	7790	488	1	2	1
158910	079770	8390	488	1	2	1
158910	079770	8990	488	1	2	1
158910	079770	2990	561	1	2	1
158910	079770	3590	561	1	2	1
158910	079770	4190	561	1	2	1
158910	079770	4790	561	1	2	1
158910	079770	5390	561	1	2	1
158910	079770	5990	561	1	2	1
158910	079770	6590	561	1	2	1
158910	079770	7190	561	1	2	1
158910	079770	7790	561	1	2	1
158910	079770	8390	561	1	2	1
158910	079770	8990	561	1	2	1
158910	079770	2990	642	1	2	1
158910	079770	3590	642	1	2	1
158910	079770	4190	642	1	2	1
158910	079770	4790	642	1	2	1
158910	079770	5390	642	1	2	1
158910	079770	5990	642	1	2	1
158910	079770	6590	642	1	2	1
158910	079770	7190	642	1	2	1
158910	079770	7790	642	1	2	1
158910	079770	8390	642	1	2	1
158910	079770	8990	642	1	2	1
192620	079770	2990	488	1	2	1
192620	079770	3590	488	1	2	1
192620	079770	4190	488	1	2	1
192620	079770	4790	488	1	2	1
192620	079770	5390	488	1	2	1
192620	079770	5990	488	1	2	1
192620	079770	6590	488	1	2	1
192620	079770	7190	488	1	2	1
192620	079770	7790	488	1	2	1
192620	079770	8390	488	1	2	1
192620	079770	8990	488	1	2	1
192620	079770	2990	561	1	2	1
192620	079770	3590	561	1	2	1
192620	079770	4190	561	1	2	1
192620	079770	4790	561	1	2	1
192620	079770	5390	561	1	2	1
192620	079770	5990	561	1	2	1
192620	079770	6590	561	1	2	1
192620	079770	7190	561	1	2	1
192620	079770	7790	561	1	2	1
192620	079770	8390	561	1	2	1
192620	079770	8990	561	1	2	1
192620	079770	2990	642	1	2	1
192620	079770	3590	642	1	2	1
192620	079770	4190	642	1	2	1
192620	079770	4790	642	1	2	1
192620	079770	5390	642	1	2	1
192620	079770	5990	642	1	2	1
192620	079770	6590	642	1	2	1
192620	079770	7190	642	1	2	1
192620	079770	7790	642	1	2	1
192620	079770	8390	642	1	2	1
192620	079770	8990	642	1	2	1
125200	106740	2990	488	0	2	1
125200	106740	3590	488	0	2	1
125200	106740	4190	488	0	2	1
125200	106740	4790	488	0	2	1
125200	106740	5390	488	0	2	1
125200	106740	5990	488	0	2	1
125200	106740	6590	488	0	2	1
125200	106740	7190	488	0	2	1
125200	106740	7790	488	0	2	1
125200	106740	8390	488	0	2	1
125200	106740	8990	488	0	2	1
125200	106740	2990	561	0	2	1
125200	106740	3590	561	0	2	1
125200	106740	4190	561	0	2	1
125200	106740	4790	561	0	2	1
125200	106740	5390	561	0	2	1
125200	106740	5990	561	0	2	1
125200	106740	6590	561	0	2	1
125200	106740	7190	561	0	2	1
125200	106740	7790	561	0	2	1
125200	106740	8390	561	0	2	1
125200	106740	8990	561	0	2	1
125200	106740	2990	642	0	2	1
125200	106740	3590	642	0	2	1
125200	106740	4190	642	0	2	1
125200	106740	4790	642	0	2	1
125200	106740	5390	642	0	2	1
125200	106740	5990	642	0	2	1
125200	106740	6590	642	0	2	1
125200	106740	7190	642	0	2	1
125200	106740	7790	642	0	2	1
125200	106740	8390	642	0	2	1
125200	106740	8990	642	0	2	1
158910	106740	2990	488	1	2	1
158910	106740	3590	488	1	2	1
158910	106740	4190	488	1	2	1
158910	106740	4790	488	1	2	1
158910	106740	5390	488	1	2	1
158910	106740	5990	488	1	2	1
158910	106740	6590	488	1	2	1
158910	106740	7190	488	1	2	1
158910	106740	7790	488	1	2	1
158910	106740	8390	488	1	2	1
158910	106740	8990	488	1	2	1
158910	106740	2990	561	1	2	1
158910	106740	3590	561	1	2	1
158910	106740	4190	561	1	2	1
158910	106740	4790	561	1	2	1
158910	106740	5390	561	1	2	1
158910	106740	5990	561	1	2	1
158910	106740	6590	561	1	2	1
158910	106740	7190	561	1	2	1
158910	106740	7790	561	1	2	1
158910	106740	8390	561	1	2	1
158910	106740	8990	561	1	2	1
158910	106740	2990	642	1	2	1
158910	106740	3590	642	1	2	1
158910	106740	4190	642	1	2	1
158910	106740	4790	642	1	2	1
158910	106740	5390	642	1	2	1
158910	106740	5990	642	1	2	1
158910	106740	6590	642	1	2	1
158910	106740	7190	642	1	2	1
158910	106740	7790	642	1	2	1
158910	106740	8390	642	1	2	1
158910	106740	8990	642	1	2	1
192620	106740	2990	488	1	2	1
192620	106740	3590	488	1	2	1
192620	106740	4190	488	1	2	1
192620	106740	4790	488	1	2	1
192620	106740	5390	488	1	2	1
192620	106740	5990	488	1	2	1
192620	106740	6590	488	1	2	1
192620	106740	7190	488	1	2	1
192620	106740	7790	488	1	2	1
192620	106740	8390	488	1	2	1
192620	106740	8990	488	1	2	1
192620	106740	2990	561	1	2	1
192620	106740	3590	561	1	2	1
192620	106740	4190	561	1	2	1
192620	106740	4790	561	1	2	1
192620	106740	5390	561	1	2	1
192620	106740	5990	561	1	2	1
192620	106740	6590	561	1	2	1
192620	106740	7190	561	1	2	1
192620	106740	7790	561	1	2	1
192620	106740	8390	561	1	2	1
192620	106740	8990	561	1	2	1
192620	106740	2990	642	1	2	1
192620	106740	3590	642	1	2	1
192620	106740	4190	642	1	2	1
192620	106740	4790	642	1	2	1
192620	106740	5390	642	1	2	1
192620	106740	5990	642	1	2	1
192620	106740	6590	642	1	2	1
192620	106740	7190	642	1	2	1
192620	106740	7790	642	1	2	1
192620	106740	8390	642	1	2	1
192620	106740	8990	642	1	2	1
125200	133710	2990	488	0	2	1
125200	133710	3590	488	0	2	1
125200	133710	4190	488	0	2	1
125200	133710	4790	488	0	2	1
125200	133710	5390	488	0	2	1
125200	133710	5990	488	0	2	1
125200	133710	6590	488	0	2	1
125200	133710	7190	488	0	2	1
125200	133710	7790	488	0	2	1
125200	133710	8390	488	0	2	1
125200	133710	8990	488	0	2	1
125200	133710	2990	561	0	2	1
125200	133710	3590	561	0	2	1
125200	133710	4190	561	0	2	1
125200	133710	4790	561	0	2	1
125200	133710	5390	561	0	2	1
125200	133710	5990	561	0	2	1
125200	133710	6590	561	0	2	1
125200	133710	7190	561	0	2	1
125200	133710	7790	561	0	2	1
125200	133710	8390	561	0	2	1
125200	133710	8990	561	0	2	1
125200	133710	2990	642	0	2	1
125200	133710	3590	642	0	2	1
125200	133710	4190	642	0	2	1
125200	133710	4790	642	0	2	1
125200	133710	5390	642	0	2	1
125200	133710	5990	642	0	2	1
125200	133710	6590	642	0	2	1
125200	133710	7190	642	0	2	1
125200	133710	7790	642	0	2	1
125200	133710	8390	642	0	2	1
125200	133710	8990	642	0	2	1
158910	133710	2990	488	1	2	1
158910	133710	3590	488	1	2	1
158910	133710	4190	488	1	2	1
158910	133710	4790	488	1	2	1
158910	133710	5390	488	1	2	1
158910	133710	5990	488	1	2	1
158910	133710	6590	488	1	2	1
158910	133710	7190	488	1	2	1
158910	133710	7790	488	1	2	1
158910	133710	8390	488	1	2	1
158910	133710	8990	488	1	2	1
158910	133710	2990	561	1	2	1
158910	133710	3590	561	1	2	1
158910	133710	4190	561	1	2	1
158910	133710	4790	561	1	2	1
158910	133710	5390	561	1	2	1
158910	133710	5990	561	1	2	1
158910	133710	6590	561	1	2	1
158910	133710	7190	561	1	2	1
158910	133710	7790	561	1	2	1
158910	133710	8390	561	1	2	1
158910	133710	8990	561	1	2	1
158910	133710	2990	642	1	2	1
158910	133710	3590	642	1	2	1
158910	133710	4190	642	1	2	1
158910	133710	4790	642	1	2	1
158910	133710	5390	642	1	2	1
158910	133710	5990	642	1	2	1
158910	133710	6590	642	1	2	1
158910	133710	7190	642	1	2	1
158910	133710	7790	642	1	2	1
158910	133710	8390	642	1	2	1
158910	133710	8990	642	1	2	1
192620	133710	2990	488	1	2	1
192620	133710	3590	488	1	2	1
192620	133710	4190	488	1	2	1
192620	133710	4790	488	1	2	1
192620	133710	5390	488	1	2	1
192620	133710	5990	488	1	2	1
192620	133710	6590	488	1	2	1
192620	133710	7190	488	1	2	1
192620	133710	7790	488	1	2	1
192620	133710	8390	488	1	2	1
192620	133710	8990	488	1	2	1
192620	133710	2990	561	1	2	1
192620	133710	3590	561	1	2	1
192620	133710	4190	561	1	2	1
192620	133710	4790	561	1	2	1
192620	133710	5390	561	1	2	1
192620	133710	5990	561	1	2	1
192620	133710	6590	561	1	2	1
192620	133710	7190	561	1	2	1
192620	133710	7790	561	1	2	1
192620	133710	8390	561	1	2	1
192620	133710	8990	561	1	2	1
192620	133710	2990	642	1	2	1
192620	133710	3590	642	1	2	1
192620	133710	4190	642	1	2	1
192620	133710	4790	642	1	2	1
192620	133710	5390	642	1	2	1
192620	133710	5990	642	1	2	1
192620	133710	6590	642	1	2	1
192620	133710	7190	642	1	2	1
192620	133710	7790	642	1	2	1
192620	133710	8390	642	1	2	1
192620	133710	8990	642	1	2	1
125200	160680	2990	488	0	2	1
125200	160680	3590	488	0	2	1
125200	160680	4190	488	0	2	1
125200	160680	4790	488	0	2	1
125200	160680	5390	488	0	2	1
125200	160680	5990	488	0	2	1
125200	160680	6590	488	0	2	1
125200	160680	7190	488	0	2	1
125200	160680	7790	488	0	2	1
125200	160680	8390	488	0	2	1
125200	160680	8990	488	0	2	1
125200	160680	2990	561	0	2	1
125200	160680	3590	561	0	2	1
125200	160680	4190	561	0	2	1
125200	160680	4790	561	0	2	1
125200	160680	5390	561	0	2	1
125200	160680	5990	561	0	2	1
125200	160680	6590	561	0	2	1
125200	160680	7190	561	0	2	1
125200	160680	7790	561	0	2	1
125200	160680	8390	561	0	2	1
125200	160680	8990	561	0	2	1
125200	160680	2990	642	0	2	1
125200	160680	3590	642	0	2	1
125200	160680	4190	642	0	2	1
125200	160680	4790	642	0	2	1
125200	160680	5390	642	0	2	1
125200	160680	5990	642	0	2	1
125200	160680	6590	642	0	2	1
125200	160680	7190	642	0	2	1
125200	160680	7790	642	0	2	1
125200	160680	8390	642	0	2	1
125200	160680	8990	642	0	2	1
158910	160680	2990	488	1	2	1
158910	160680	3590	488	1	2	1
158910	160680	4190	488	1	2	1
158910	160680	4790	488	1	2	1
158910	160680	5390	488	1	2	1
158910	160680	5990	488	1	2	1
158910	160680	6590	488	1	2	1
158910	160680	7190	488	1	2	1
158910	160680	7790	488	1	2	1
158910	160680	8390	488	1	2	1
158910	160680	8990	488	1	2	1
158910	160680	2990	561	1	2	1
158910	160680	3590	561	1	2	1
158910	160680	4190	561	1	2	1
158910	160680	4790	561	1	2	1
158910	160680	5390	561	1	2	1
158910	160680	5990	561	1	2	1
158910	160680	6590	561	1	2	1
158910	160680	7190	561	1	2	1
158910	160680	7790	561	1	2	1
158910	160680	8390	561	1	2	1
158910	160680	8990	561	1	2	1
158910	160680	2990	642	1	2	1
158910	160680	3590	642	1	2	1
158910	160680	4190	642	1	2	1
158910	160680	4790	642	1	2	1
158910	160680	5390	642	1	2	1
158910	160680	5990	642	1	2	1
158910	160680	6590	642	1	2	1
158910	160680	7190	642	1	2	1
158910	160680	7790	642	1	2	1
158910	160680	8390	642	1	2	1
158910	160680	8990	642	1	2	1
192620	160680	2990	488	1	2	1
192620	160680	3590	488	1	2	1
192620	160680	4190	488	1	2	1
192620	160680	4790	488	1	2	1
192620	160680	5390	488	1	2	1
192620	160680	5990	488	1	2	1
192620	160680	6590	488	1	2	1
192620	160680	7190	488	1	2	1
192620	160680	7790	488	1	2	1
192620	160680	8390	488	1	2	1
192620	160680	8990	488	1	2	1
192620	160680	2990	561	1	2	1
192620	160680	3590	561	1	2	1
192620	160680	4190	561	1	2	1
192620	160680	4790	561	1	2	1
192620	160680	5390	561	1	2	1
192620	160680	5990	561	1	2	1
192620	160680	6590	561	1	2	1
192620	160680	7190	561	1	2	1
192620	160680	7790	561	1	2	1
192620	160680	8390	561	1	2	1
192620	160680	8990	561	1	2	1
192620	160680	2990	642	1	2	1
192620	160680	3590	642	1	2	1
192620	160680	4190	642	1	2	1
192620	160680	4790	642	1	2	1
192620	160680	5390	642	1	2	1
192620	160680	5990	642	1	2	1
192620	160680	6590	642	1	2	1
192620	160680	7190	642	1	2	1
192620	160680	7790	642	1	2	1
192620	160680	8390	642	1	2	1
192620	160680	8990	642	1	2	1
125200	187650	2990	488	0	2	1
125200	187650	3590	488	0	2	1
125200	187650	4190	488	0	2	1
125200	187650	4790	488	0	2	1
125200	187650	5390	488	0	2	1
125200	187650	5990	488	0	2	1
125200	187650	6590	488	0	2	1
125200	187650	7190	488	0	2	1
125200	187650	7790	488	0	2	1
125200	187650	8390	488	0	2	1
125200	187650	8990	488	0	2	1
125200	187650	2990	561	0	2	1
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