Obj	H_Res	µm/pix	Z step (µm)	Scanning	
LCT 3.6x	1600	1.843	2	Fast	
Wavelength	Power (%)	Balance			
488	50.00	1.00			
561	57.14	1.00			
647	20.00	1.00			
785	20.00	1.00			
X	Y	Z	Laser	Side	Exposure
070040	077930	3075	1	0	1
070040	077930	3675	1	0	1
070040	077930	4275	1	0	1
070040	077930	4875	1	0	1
070040	077930	5475	1	0	1
070040	077930	6075	1	0	1
070040	077930	6675	1	0	1
070040	077930	3075	0	0	1
070040	077930	3675	0	0	1
070040	077930	4275	0	0	1
070040	077930	4875	0	0	1
070040	077930	5475	0	0	1
070040	077930	6075	0	0	1
070040	077930	6675	0	0	1
103210	077930	3075	1	0	1
103210	077930	3675	1	0	1
103210	077930	4275	1	0	1
103210	077930	4875	1	0	1
103210	077930	5475	1	0	1
103210	077930	6075	1	0	1
103210	077930	6675	1	0	1
103210	077930	3075	0	0	1
103210	077930	3675	0	0	1
103210	077930	4275	0	0	1
103210	077930	4875	0	0	1
103210	077930	5475	0	0	1
103210	077930	6075	0	0	1
103210	077930	6675	0	0	1
136380	077930	3075	1	1	1
136380	077930	3675	1	1	1
136380	077930	4275	1	1	1
136380	077930	4875	1	1	1
136380	077930	5475	1	1	1
136380	077930	6075	1	1	1
136380	077930	6675	1	1	1
136380	077930	3075	0	1	1
136380	077930	3675	0	1	1
136380	077930	4275	0	1	1
136380	077930	4875	0	1	1
136380	077930	5475	0	1	1
136380	077930	6075	0	1	1
136380	077930	6675	0	1	1
169550	077930	3075	1	1	1
169550	077930	3675	1	1	1
169550	077930	4275	1	1	1
169550	077930	4875	1	1	1
169550	077930	5475	1	1	1
169550	077930	6075	1	1	1
169550	077930	6675	1	1	1
169550	077930	3075	0	1	1
169550	077930	3675	0	1	1
169550	077930	4275	0	1	1
169550	077930	4875	0	1	1
169550	077930	5475	0	1	1
169550	077930	6075	0	1	1
169550	077930	6675	0	1	1
202720	077930	3075	1	1	1
202720	077930	3675	1	1	1
202720	077930	4275	1	1	1
202720	077930	4875	1	1	1
202720	077930	5475	1	1	1
202720	077930	6075	1	1	1
202720	077930	6675	1	1	1
202720	077930	3075	0	1	1
202720	077930	3675	0	1	1
202720	077930	4275	0	1	1
202720	077930	4875	0	1	1
202720	077930	5475	0	1	1
202720	077930	6075	0	1	1
202720	077930	6675	0	1	1
070040	104470	3075	1	0	1
070040	104470	3675	1	0	1
070040	104470	4275	1	0	1
070040	104470	4875	1	0	1
070040	104470	5475	1	0	1
070040	104470	6075	1	0	1
070040	104470	6675	1	0	1
070040	104470	3075	0	0	1
070040	104470	3675	0	0	1
070040	104470	4275	0	0	1
070040	104470	4875	0	0	1
070040	104470	5475	0	0	1
070040	104470	6075	0	0	1
070040	104470	6675	0	0	1
103210	104470	3075	1	0	1
103210	104470	3675	1	0	1
103210	104470	4275	1	0	1
103210	104470	4875	1	0	1
103210	104470	5475	1	0	1
103210	104470	6075	1	0	1
103210	104470	6675	1	0	1
103210	104470	3075	0	0	1
103210	104470	3675	0	0	1
103210	104470	4275	0	0	1
103210	104470	4875	0	0	1
103210	104470	5475	0	0	1
103210	104470	6075	0	0	1
103210	104470	6675	0	0	1
136380	104470	3075	1	1	1
136380	104470	3675	1	1	1
136380	104470	4275	1	1	1
136380	104470	4875	1	1	1
136380	104470	5475	1	1	1
136380	104470	6075	1	1	1
136380	104470	6675	1	1	1
136380	104470	3075	0	1	1
136380	104470	3675	0	1	1
136380	104470	4275	0	1	1
136380	104470	4875	0	1	1
136380	104470	5475	0	1	1
136380	104470	6075	0	1	1
136380	104470	6675	0	1	1
169550	104470	3075	1	1	1
169550	104470	3675	1	1	1
169550	104470	4275	1	1	1
169550	104470	4875	1	1	1
169550	104470	5475	1	1	1
169550	104470	6075	1	1	1
169550	104470	6675	1	1	1
169550	104470	3075	0	1	1
169550	104470	3675	0	1	1
169550	104470	4275	0	1	1
169550	104470	4875	0	1	1
169550	104470	5475	0	1	1
169550	104470	6075	0	1	1
169550	104470	6675	0	1	1
202720	104470	3075	1	1	1
202720	104470	3675	1	1	1
202720	104470	4275	1	1	1
202720	104470	4875	1	1	1
202720	104470	5475	1	1	1
202720	104470	6075	1	1	1
202720	104470	6675	1	1	1
202720	104470	3075	0	1	1
202720	104470	3675	0	1	1
202720	104470	4275	0	1	1
202720	104470	4875	0	1	1
202720	104470	5475	0	1	1
202720	104470	6075	0	1	1
202720	104470	6675	0	1	1
070040	131010	3075	1	0	1
070040	131010	3675	1	0	1
070040	131010	4275	1	0	1
070040	131010	4875	1	0	1
070040	131010	5475	1	0	1
070040	131010	6075	1	0	1
070040	131010	6675	1	0	1
070040	131010	3075	0	0	1
070040	131010	3675	0	0	1
070040	131010	4275	0	0	1
070040	131010	4875	0	0	1
070040	131010	5475	0	0	1
070040	131010	6075	0	0	1
070040	131010	6675	0	0	1
103210	131010	3075	1	0	1
103210	131010	3675	1	0	1
103210	131010	4275	1	0	1
103210	131010	4875	1	0	1
103210	131010	5475	1	0	1
103210	131010	6075	1	0	1
103210	131010	6675	1	0	1
103210	131010	3075	0	0	1
103210	131010	3675	0	0	1
103210	131010	4275	0	0	1
103210	131010	4875	0	0	1
103210	131010	5475	0	0	1
103210	131010	6075	0	0	1
103210	131010	6675	0	0	1
136380	131010	3075	1	1	1
136380	131010	3675	1	1	1
136380	131010	4275	1	1	1
136380	131010	4875	1	1	1
136380	131010	5475	1	1	1
136380	131010	6075	1	1	1
136380	131010	6675	1	1	1
136380	131010	3075	0	1	1
136380	131010	3675	0	1	1
136380	131010	4275	0	1	1
136380	131010	4875	0	1	1
136380	131010	5475	0	1	1
136380	131010	6075	0	1	1
136380	131010	6675	0	1	1
169550	131010	3075	1	1	1
169550	131010	3675	1	1	1
169550	131010	4275	1	1	1
169550	131010	4875	1	1	1
169550	131010	5475	1	1	1
169550	131010	6075	1	1	1
169550	131010	6675	1	1	1
169550	131010	3075	0	1	1
169550	131010	3675	0	1	1
169550	131010	4275	0	1	1
169550	131010	4875	0	1	1
169550	131010	5475	0	1	1
169550	131010	6075	0	1	1
169550	131010	6675	0	1	1
202720	131010	3075	1	1	1
202720	131010	3675	1	1	1
202720	131010	4275	1	1	1
202720	131010	4875	1	1	1
202720	131010	5475	1	1	1
202720	131010	6075	1	1	1
202720	131010	6675	1	1	1
202720	131010	3075	0	1	1
202720	131010	3675	0	1	1
202720	131010	4275	0	1	1
202720	131010	4875	0	1	1
202720	131010	5475	0	1	1
202720	131010	6075	0	1	1
202720	131010	6675	0	1	1
070040	157550	3075	1	0	1
070040	157550	3675	1	0	1
070040	157550	4275	1	0	1
070040	157550	4875	1	0	1
070040	157550	5475	1	0	1
070040	157550	6075	1	0	1
070040	157550	6675	1	0	1
070040	157550	3075	0	0	1
070040	157550	3675	0	0	1
070040	157550	4275	0	0	1
070040	157550	4875	0	0	1
070040	157550	5475	0	0	1
070040	157550	6075	0	0	1
070040	157550	6675	0	0	1
103210	157550	3075	1	0	1
103210	157550	3675	1	0	1
103210	157550	4275	1	0	1
103210	157550	4875	1	0	1
103210	157550	5475	1	0	1
103210	157550	6075	1	0	1
103210	157550	6675	1	0	1
103210	157550	3075	0	0	1
103210	157550	3675	0	0	1
103210	157550	4275	0	0	1
103210	157550	4875	0	0	1
103210	157550	5475	0	0	1
103210	157550	6075	0	0	1
103210	157550	6675	0	0	1
136380	157550	3075	1	1	1
136380	157550	3675	1	1	1
136380	157550	4275	1	1	1
136380	157550	4875	1	1	1
136380	157550	5475	1	1	1
136380	157550	6075	1	1	1
136380	157550	6675	1	1	1
136380	157550	3075	0	1	1
136380	157550	3675	0	1	1
136380	157550	4275	0	1	1
136380	157550	4875	0	1	1
136380	157550	5475	0	1	1
136380	157550	6075	0	1	1
136380	157550	6675	0	1	1
169550	157550	3075	1	1	1
169550	157550	3675	1	1	1
169550	157550	4275	1	1	1
169550	157550	4875	1	1	1
169550	157550	5475	1	1	1
169550	157550	6075	1	1	1
169550	157550	6675	1	1	1
169550	157550	3075	0	1	1
169550	157550	3675	0	1	1
169550	157550	4275	0	1	1
169550	157550	4875	0	1	1
169550	157550	5475	0	1	1
169550	157550	6075	0	1	1
169550	157550	6675	0	1	1
202720	157550	3075	1	1	1
202720	157550	3675	1	1	1
202720	157550	4275	1	1	1
202720	157550	4875	1	1	1
202720	157550	5475	1	1	1
202720	157550	6075	1	1	1
202720	157550	6675	1	1	1
202720	157550	3075	0	1	1
202720	157550	3675	0	1	1
202720	157550	4275	0	1	1
202720	157550	4875	0	1	1
202720	157550	5475	0	1	1
202720	157550	6075	0	1	1
202720	157550	6675	0	1	1
070040	184090	3075	1	0	1
070040	184090	3675	1	0	1
070040	184090	4275	1	0	1
070040	184090	4875	1	0	1
070040	184090	5475	1	0	1
070040	184090	6075	1	0	1
070040	184090	6675	1	0	1
070040	184090	3075	0	0	1
070040	184090	3675	0	0	1
070040	184090	4275	0	0	1
070040	184090	4875	0	0	1
070040	184090	5475	0	0	1
070040	184090	6075	0	0	1
070040	184090	6675	0	0	1
103210	184090	3075	1	0	1
103210	184090	3675	1	0	1
103210	184090	4275	1	0	1
103210	184090	4875	1	0	1
103210	184090	5475	1	0	1
103210	184090	6075	1	0	1
103210	184090	6675	1	0	1
103210	184090	3075	0	0	1
103210	184090	3675	0	0	1
103210	184090	4275	0	0	1
103210	184090	4875	0	0	1
103210	184090	5475	0	0	1
103210	184090	6075	0	0	1
103210	184090	6675	0	0	1
136380	184090	3075	1	1	1
136380	184090	3675	1	1	1
136380	184090	4275	1	1	1
136380	184090	4875	1	1	1
136380	184090	5475	1	1	1
136380	184090	6075	1	1	1
136380	184090	6675	1	1	1
136380	184090	3075	0	1	1
136380	184090	3675	0	1	1
136380	184090	4275	0	1	1
136380	184090	4875	0	1	1
136380	184090	5475	0	1	1
136380	184090	6075	0	1	1
136380	184090	6675	0	1	1
169550	184090	3075	1	1	1
169550	184090	3675	1	1	1
169550	184090	4275	1	1	1
169550	184090	4875	1	1	1
169550	184090	5475	1	1	1
169550	184090	6075	1	1	1
169550	184090	6675	1	1	1
169550	184090	3075	0	1	1
169550	184090	3675	0	1	1
169550	184090	4275	0	1	1
169550	184090	4875	0	1	1
169550	184090	5475	0	1	1
169550	184090	6075	0	1	1
169550	184090	6675	0	1	1
202720	184090	3075	1	1	1
202720	184090	3675	1	1	1
202720	184090	4275	1	1	1
202720	184090	4875	1	1	1
202720	184090	5475	1	1	1
202720	184090	6075	1	1	1
202720	184090	6675	1	1	1
202720	184090	3075	0	1	1
202720	184090	3675	0	1	1
202720	184090	4275	0	1	1
202720	184090	4875	0	1	1
202720	184090	5475	0	1	1
202720	184090	6075	0	1	1
202720	184090	6675	0	1	1
070040	210630	3075	1	0	1
070040	210630	3675	1	0	1
070040	210630	4275	1	0	1
070040	210630	4875	1	0	1
070040	210630	5475	1	0	1
070040	210630	6075	1	0	1
070040	210630	6675	1	0	1
070040	210630	3075	0	0	1
070040	210630	3675	0	0	1
070040	210630	4275	0	0	1
070040	210630	4875	0	0	1
070040	210630	5475	0	0	1
070040	210630	6075	0	0	1
070040	210630	6675	0	0	1
103210	210630	3075	1	0	1
103210	210630	3675	1	0	1
103210	210630	4275	1	0	1
103210	210630	4875	1	0	1
103210	210630	5475	1	0	1
103210	210630	6075	1	0	1
103210	210630	6675	1	0	1
103210	210630	3075	0	0	1
103210	210630	3675	0	0	1
103210	210630	4275	0	0	1
103210	210630	4875	0	0	1
103210	210630	5475	0	0	1
103210	210630	6075	0	0	1
103210	210630	6675	0	0	1
136380	210630	3075	1	1	1
136380	210630	3675	1	1	1
136380	210630	4275	1	1	1
136380	210630	4875	1	1	1
136380	210630	5475	1	1	1
136380	210630	6075	1	1	1
136380	210630	6675	1	1	1
136380	210630	3075	0	1	1
136380	210630	3675	0	1	1
136380	210630	4275	0	1	1
136380	210630	4875	0	1	1
136380	210630	5475	0	1	1
136380	210630	6075	0	1	1
136380	210630	6675	0	1	1
169550	210630	3075	1	1	1
169550	210630	3675	1	1	1
169550	210630	4275	1	1	1
169550	210630	4875	1	1	1
169550	210630	5475	1	1	1
169550	210630	6075	1	1	1
169550	210630	6675	1	1	1
169550	210630	3075	0	1	1
169550	210630	3675	0	1	1
169550	210630	4275	0	1	1
169550	210630	4875	0	1	1
169550	210630	5475	0	1	1
169550	210630	6075	0	1	1
169550	210630	6675	0	1	1
202720	210630	3075	1	1	1
202720	210630	3675	1	1	1
202720	210630	4275	1	1	1
202720	210630	4875	1	1	1
202720	210630	5475	1	1	1
202720	210630	6075	1	1	1
202720	210630	6675	1	1	1
202720	210630	3075	0	1	1
202720	210630	3675	0	1	1
202720	210630	4275	0	1	1
202720	210630	4875	0	1	1
202720	210630	5475	0	1	1
202720	210630	6075	0	1	1
202720	210630	6675	0	1	1
070040	237170	3075	1	0	1
070040	237170	3675	1	0	1
070040	237170	4275	1	0	1
070040	237170	4875	1	0	1
070040	237170	5475	1	0	1
070040	237170	6075	1	0	1
070040	237170	6675	1	0	1
070040	237170	3075	0	0	1
070040	237170	3675	0	0	1
070040	237170	4275	0	0	1
070040	237170	4875	0	0	1
070040	237170	5475	0	0	1
070040	237170	6075	0	0	1
070040	237170	6675	0	0	1
103210	237170	3075	1	0	1
103210	237170	3675	1	0	1
103210	237170	4275	1	0	1
103210	237170	4875	1	0	1
103210	237170	5475	1	0	1
103210	237170	6075	1	0	1
103210	237170	6675	1	0	1
103210	237170	3075	0	0	1
103210	237170	3675	0	0	1
103210	237170	4275	0	0	1
103210	237170	4875	0	0	1
103210	237170	5475	0	0	1
103210	237170	6075	0	0	1
103210	237170	6675	0	0	1
136380	237170	3075	1	1	1
136380	237170	3675	1	1	1
136380	237170	4275	1	1	1
136380	237170	4875	1	1	1
136380	237170	5475	1	1	1
136380	237170	6075	1	1	1
136380	237170	6675	1	1	1
136380	237170	3075	0	1	1
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