Obj V_Res µm/pix Z step (µm) Scanning LCT 4x 1600 1.873 4 Fast Wavelength Power (%) Balance 488 15.00 1.00 561 10.00 1.00 647 20.00 1.00 785 0.00 1.00 X Y Z Laser Side Exposure 134180 111940 5557 0 1 2 134180 111940 6157 0 1 2 134180 111940 6757 0 1 2 134180 111940 7357 0 1 2 134180 111940 7957 0 1 2 134180 111940 8557 0 1 2 134180 111940 9157 0 1 2 134180 111940 9757 0 1 2 134180 111940 10357 0 1 2 134180 111940 10957 0 1 2 134180 111940 11557 0 1 2 134180 111940 5557 1 1 2 134180 111940 6157 1 1 2 134180 111940 6757 1 1 2 134180 111940 7357 1 1 2 134180 111940 7957 1 1 2 134180 111940 8557 1 1 2 134180 111940 9157 1 1 2 134180 111940 9757 1 1 2 134180 111940 10357 1 1 2 134180 111940 10957 1 1 2 134180 111940 11557 1 1 2 134180 111940 5557 2 1 2 134180 111940 6157 2 1 2 134180 111940 6757 2 1 2 134180 111940 7357 2 1 2 134180 111940 7957 2 1 2 134180 111940 8557 2 1 2 134180 111940 9157 2 1 2 134180 111940 9757 2 1 2 134180 111940 10357 2 1 2 134180 111940 10957 2 1 2 134180 111940 11557 2 1 2 167890 111940 5557 0 1 2 167890 111940 6157 0 1 2 167890 111940 6757 0 1 2 167890 111940 7357 0 1 2 167890 111940 7957 0 1 2 167890 111940 8557 0 1 2 167890 111940 9157 0 1 2 167890 111940 9757 0 1 2 167890 111940 10357 0 1 2 167890 111940 10957 0 1 2 167890 111940 11557 0 1 2 167890 111940 5557 1 1 2 167890 111940 6157 1 1 2 167890 111940 6757 1 1 2 167890 111940 7357 1 1 2 167890 111940 7957 1 1 2 167890 111940 8557 1 1 2 167890 111940 9157 1 1 2 167890 111940 9757 1 1 2 167890 111940 10357 1 1 2 167890 111940 10957 1 1 2 167890 111940 11557 1 1 2 167890 111940 5557 2 1 2 167890 111940 6157 2 1 2 167890 111940 6757 2 1 2 167890 111940 7357 2 1 2 167890 111940 7957 2 1 2 167890 111940 8557 2 1 2 167890 111940 9157 2 1 2 167890 111940 9757 2 1 2 167890 111940 10357 2 1 2 167890 111940 10957 2 1 2 167890 111940 11557 2 1 2 134180 138910 5557 0 1 2 134180 138910 6157 0 1 2 134180 138910 6757 0 1 2 134180 138910 7357 0 1 2 134180 138910 7957 0 1 2 134180 138910 8557 0 1 2 134180 138910 9157 0 1 2 134180 138910 9757 0 1 2 134180 138910 10357 0 1 2 134180 138910 10957 0 1 2 134180 138910 11557 0 1 2 134180 138910 5557 1 1 2 134180 138910 6157 1 1 2 134180 138910 6757 1 1 2 134180 138910 7357 1 1 2 134180 138910 7957 1 1 2 134180 138910 8557 1 1 2 134180 138910 9157 1 1 2 134180 138910 9757 1 1 2 134180 138910 10357 1 1 2 134180 138910 10957 1 1 2 134180 138910 11557 1 1 2 134180 138910 5557 2 1 2 134180 138910 6157 2 1 2 134180 138910 6757 2 1 2 134180 138910 7357 2 1 2 134180 138910 7957 2 1 2 134180 138910 8557 2 1 2 134180 138910 9157 2 1 2 134180 138910 9757 2 1 2 134180 138910 10357 2 1 2 134180 138910 10957 2 1 2 134180 138910 11557 2 1 2 167890 138910 5557 0 1 2 167890 138910 6157 0 1 2 167890 138910 6757 0 1 2 167890 138910 7357 0 1 2 167890 138910 7957 0 1 2 167890 138910 8557 0 1 2 167890 138910 9157 0 1 2 167890 138910 9757 0 1 2 167890 138910 10357 0 1 2 167890 138910 10957 0 1 2 167890 138910 11557 0 1 2 167890 138910 5557 1 1 2 167890 138910 6157 1 1 2 167890 138910 6757 1 1 2 167890 138910 7357 1 1 2 167890 138910 7957 1 1 2 167890 138910 8557 1 1 2 167890 138910 9157 1 1 2 167890 138910 9757 1 1 2 167890 138910 10357 1 1 2 167890 138910 10957 1 1 2 167890 138910 11557 1 1 2 167890 138910 5557 2 1 2 167890 138910 6157 2 1 2 167890 138910 6757 2 1 2 167890 138910 7357 2 1 2 167890 138910 7957 2 1 2 167890 138910 8557 2 1 2 167890 138910 9157 2 1 2 167890 138910 9757 2 1 2 167890 138910 10357 2 1 2 167890 138910 10957 2 1 2 167890 138910 11557 2 1 2 134180 165880 5557 0 1 2 134180 165880 6157 0 1 2 134180 165880 6757 0 1 2 134180 165880 7357 0 1 2 134180 165880 7957 0 1 2 134180 165880 8557 0 1 2 134180 165880 9157 0 1 2 134180 165880 9757 0 1 2 134180 165880 10357 0 1 2 134180 165880 10957 0 1 2 134180 165880 11557 0 1 2 134180 165880 5557 1 1 2 134180 165880 6157 1 1 2 134180 165880 6757 1 1 2 134180 165880 7357 1 1 2 134180 165880 7957 1 1 2 134180 165880 8557 1 1 2 134180 165880 9157 1 1 2 134180 165880 9757 1 1 2 134180 165880 10357 1 1 2 134180 165880 10957 1 1 2 134180 165880 11557 1 1 2 134180 165880 5557 2 1 2 134180 165880 6157 2 1 2 134180 165880 6757 2 1 2 134180 165880 7357 2 1 2 134180 165880 7957 2 1 2 134180 165880 8557 2 1 2 134180 165880 9157 2 1 2 134180 165880 9757 2 1 2 134180 165880 10357 2 1 2 134180 165880 10957 2 1 2 134180 165880 11557 2 1 2 167890 165880 5557 0 1 2 167890 165880 6157 0 1 2 167890 165880 6757 0 1 2 167890 165880 7357 0 1 2 167890 165880 7957 0 1 2 167890 165880 8557 0 1 2 167890 165880 9157 0 1 2 167890 165880 9757 0 1 2 167890 165880 10357 0 1 2 167890 165880 10957 0 1 2 167890 165880 11557 0 1 2 167890 165880 5557 1 1 2 167890 165880 6157 1 1 2 167890 165880 6757 1 1 2 167890 165880 7357 1 1 2 167890 165880 7957 1 1 2 167890 165880 8557 1 1 2 167890 165880 9157 1 1 2 167890 165880 9757 1 1 2 167890 165880 10357 1 1 2 167890 165880 10957 1 1 2 167890 165880 11557 1 1 2 167890 165880 5557 2 1 2 167890 165880 6157 2 1 2 167890 165880 6757 2 1 2 167890 165880 7357 2 1 2 167890 165880 7957 2 1 2 167890 165880 8557 2 1 2 167890 165880 9157 2 1 2 167890 165880 9757 2 1 2 167890 165880 10357 2 1 2 167890 165880 10957 2 1 2 167890 165880 11557 2 1 2 134180 192850 5557 0 1 2 134180 192850 6157 0 1 2 134180 192850 6757 0 1 2 134180 192850 7357 0 1 2 134180 192850 7957 0 1 2 134180 192850 8557 0 1 2 134180 192850 9157 0 1 2 134180 192850 9757 0 1 2 134180 192850 10357 0 1 2 134180 192850 10957 0 1 2 134180 192850 11557 0 1 2 134180 192850 5557 1 1 2 134180 192850 6157 1 1 2 134180 192850 6757 1 1 2 134180 192850 7357 1 1 2 134180 192850 7957 1 1 2 134180 192850 8557 1 1 2 134180 192850 9157 1 1 2 134180 192850 9757 1 1 2 134180 192850 10357 1 1 2 134180 192850 10957 1 1 2 134180 192850 11557 1 1 2 134180 192850 5557 2 1 2 134180 192850 6157 2 1 2 134180 192850 6757 2 1 2 134180 192850 7357 2 1 2 134180 192850 7957 2 1 2 134180 192850 8557 2 1 2 134180 192850 9157 2 1 2 134180 192850 9757 2 1 2 134180 192850 10357 2 1 2 134180 192850 10957 2 1 2 134180 192850 11557 2 1 2 167890 192850 5557 0 1 2 167890 192850 6157 0 1 2 167890 192850 6757 0 1 2 167890 192850 7357 0 1 2 167890 192850 7957 0 1 2 167890 192850 8557 0 1 2 167890 192850 9157 0 1 2 167890 192850 9757 0 1 2 167890 192850 10357 0 1 2 167890 192850 10957 0 1 2 167890 192850 11557 0 1 2 167890 192850 5557 1 1 2 167890 192850 6157 1 1 2 167890 192850 6757 1 1 2 167890 192850 7357 1 1 2 167890 192850 7957 1 1 2 167890 192850 8557 1 1 2 167890 192850 9157 1 1 2 167890 192850 9757 1 1 2 167890 192850 10357 1 1 2 167890 192850 10957 1 1 2 167890 192850 11557 1 1 2 167890 192850 5557 2 1 2 167890 192850 6157 2 1 2 167890 192850 6757 2 1 2 167890 192850 7357 2 1 2 167890 192850 7957 2 1 2 167890 192850 8557 2 1 2 167890 192850 9157 2 1 2 167890 192850 9757 2 1 2 167890 192850 10357 2 1 2 167890 192850 10957 2 1 2 167890 192850 11557 2 1 2