Obj V_Res µm/pix Z step (µm) Scanning LCT 4x 1600 1.873 4 Fast Wavelength Power (%) Balance 488 15.00 1.00 561 10.00 1.00 647 20.00 1.00 785 0.00 1.00 X Y Z Laser Side Exposure 149130 131030 4279 0 1 2 149130 131030 4879 0 1 2 149130 131030 5479 0 1 2 149130 131030 6079 0 1 2 149130 131030 6679 0 1 2 149130 131030 7279 0 1 2 149130 131030 7879 0 1 2 149130 131030 8479 0 1 2 149130 131030 9079 0 1 2 149130 131030 9679 0 1 2 149130 131030 4279 1 1 2 149130 131030 4879 1 1 2 149130 131030 5479 1 1 2 149130 131030 6079 1 1 2 149130 131030 6679 1 1 2 149130 131030 7279 1 1 2 149130 131030 7879 1 1 2 149130 131030 8479 1 1 2 149130 131030 9079 1 1 2 149130 131030 9679 1 1 2 149130 131030 4279 2 1 2 149130 131030 4879 2 1 2 149130 131030 5479 2 1 2 149130 131030 6079 2 1 2 149130 131030 6679 2 1 2 149130 131030 7279 2 1 2 149130 131030 7879 2 1 2 149130 131030 8479 2 1 2 149130 131030 9079 2 1 2 149130 131030 9679 2 1 2 182840 131030 4279 0 1 2 182840 131030 4879 0 1 2 182840 131030 5479 0 1 2 182840 131030 6079 0 1 2 182840 131030 6679 0 1 2 182840 131030 7279 0 1 2 182840 131030 7879 0 1 2 182840 131030 8479 0 1 2 182840 131030 9079 0 1 2 182840 131030 9679 0 1 2 182840 131030 4279 1 1 2 182840 131030 4879 1 1 2 182840 131030 5479 1 1 2 182840 131030 6079 1 1 2 182840 131030 6679 1 1 2 182840 131030 7279 1 1 2 182840 131030 7879 1 1 2 182840 131030 8479 1 1 2 182840 131030 9079 1 1 2 182840 131030 9679 1 1 2 182840 131030 4279 2 1 2 182840 131030 4879 2 1 2 182840 131030 5479 2 1 2 182840 131030 6079 2 1 2 182840 131030 6679 2 1 2 182840 131030 7279 2 1 2 182840 131030 7879 2 1 2 182840 131030 8479 2 1 2 182840 131030 9079 2 1 2 182840 131030 9679 2 1 2 149130 158000 4279 0 1 2 149130 158000 4879 0 1 2 149130 158000 5479 0 1 2 149130 158000 6079 0 1 2 149130 158000 6679 0 1 2 149130 158000 7279 0 1 2 149130 158000 7879 0 1 2 149130 158000 8479 0 1 2 149130 158000 9079 0 1 2 149130 158000 9679 0 1 2 149130 158000 4279 1 1 2 149130 158000 4879 1 1 2 149130 158000 5479 1 1 2 149130 158000 6079 1 1 2 149130 158000 6679 1 1 2 149130 158000 7279 1 1 2 149130 158000 7879 1 1 2 149130 158000 8479 1 1 2 149130 158000 9079 1 1 2 149130 158000 9679 1 1 2 149130 158000 4279 2 1 2 149130 158000 4879 2 1 2 149130 158000 5479 2 1 2 149130 158000 6079 2 1 2 149130 158000 6679 2 1 2 149130 158000 7279 2 1 2 149130 158000 7879 2 1 2 149130 158000 8479 2 1 2 149130 158000 9079 2 1 2 149130 158000 9679 2 1 2 182840 158000 4279 0 1 2 182840 158000 4879 0 1 2 182840 158000 5479 0 1 2 182840 158000 6079 0 1 2 182840 158000 6679 0 1 2 182840 158000 7279 0 1 2 182840 158000 7879 0 1 2 182840 158000 8479 0 1 2 182840 158000 9079 0 1 2 182840 158000 9679 0 1 2 182840 158000 4279 1 1 2 182840 158000 4879 1 1 2 182840 158000 5479 1 1 2 182840 158000 6079 1 1 2 182840 158000 6679 1 1 2 182840 158000 7279 1 1 2 182840 158000 7879 1 1 2 182840 158000 8479 1 1 2 182840 158000 9079 1 1 2 182840 158000 9679 1 1 2 182840 158000 4279 2 1 2 182840 158000 4879 2 1 2 182840 158000 5479 2 1 2 182840 158000 6079 2 1 2 182840 158000 6679 2 1 2 182840 158000 7279 2 1 2 182840 158000 7879 2 1 2 182840 158000 8479 2 1 2 182840 158000 9079 2 1 2 182840 158000 9679 2 1 2 149130 184970 4279 0 1 2 149130 184970 4879 0 1 2 149130 184970 5479 0 1 2 149130 184970 6079 0 1 2 149130 184970 6679 0 1 2 149130 184970 7279 0 1 2 149130 184970 7879 0 1 2 149130 184970 8479 0 1 2 149130 184970 9079 0 1 2 149130 184970 9679 0 1 2 149130 184970 4279 1 1 2 149130 184970 4879 1 1 2 149130 184970 5479 1 1 2 149130 184970 6079 1 1 2 149130 184970 6679 1 1 2 149130 184970 7279 1 1 2 149130 184970 7879 1 1 2 149130 184970 8479 1 1 2 149130 184970 9079 1 1 2 149130 184970 9679 1 1 2 149130 184970 4279 2 1 2 149130 184970 4879 2 1 2 149130 184970 5479 2 1 2 149130 184970 6079 2 1 2 149130 184970 6679 2 1 2 149130 184970 7279 2 1 2 149130 184970 7879 2 1 2 149130 184970 8479 2 1 2 149130 184970 9079 2 1 2 149130 184970 9679 2 1 2 182840 184970 4279 0 1 2 182840 184970 4879 0 1 2 182840 184970 5479 0 1 2 182840 184970 6079 0 1 2 182840 184970 6679 0 1 2 182840 184970 7279 0 1 2 182840 184970 7879 0 1 2 182840 184970 8479 0 1 2 182840 184970 9079 0 1 2 182840 184970 9679 0 1 2 182840 184970 4279 1 1 2 182840 184970 4879 1 1 2 182840 184970 5479 1 1 2 182840 184970 6079 1 1 2 182840 184970 6679 1 1 2 182840 184970 7279 1 1 2 182840 184970 7879 1 1 2 182840 184970 8479 1 1 2 182840 184970 9079 1 1 2 182840 184970 9679 1 1 2 182840 184970 4279 2 1 2 182840 184970 4879 2 1 2 182840 184970 5479 2 1 2 182840 184970 6079 2 1 2 182840 184970 6679 2 1 2 182840 184970 7279 2 1 2 182840 184970 7879 2 1 2 182840 184970 8479 2 1 2 182840 184970 9079 2 1 2 182840 184970 9679 2 1 2