Obj	H_Res	µm/pix	Z step (µm)	Scanning	
LCT 3.6x	1600	1.843	2	Fast	
Wavelength	Power (%)	Balance			
488	52.50	1.00			
561	74.07	1.00			
647	20.00	1.00			
785	20.00	1.00			
X	Y	Z	Laser	Side	Exposure
096060	078260	4350	1	0	1
096060	078260	4950	1	0	1
096060	078260	5550	1	0	1
096060	078260	6150	1	0	1
096060	078260	6750	1	0	1
096060	078260	7350	1	0	1
096060	078260	7950	1	0	1
096060	078260	8550	1	0	1
096060	078260	4350	0	0	1
096060	078260	4950	0	0	1
096060	078260	5550	0	0	1
096060	078260	6150	0	0	1
096060	078260	6750	0	0	1
096060	078260	7350	0	0	1
096060	078260	7950	0	0	1
096060	078260	8550	0	0	1
129230	078260	4350	1	0	1
129230	078260	4950	1	0	1
129230	078260	5550	1	0	1
129230	078260	6150	1	0	1
129230	078260	6750	1	0	1
129230	078260	7350	1	0	1
129230	078260	7950	1	0	1
129230	078260	8550	1	0	1
129230	078260	4350	0	0	1
129230	078260	4950	0	0	1
129230	078260	5550	0	0	1
129230	078260	6150	0	0	1
129230	078260	6750	0	0	1
129230	078260	7350	0	0	1
129230	078260	7950	0	0	1
129230	078260	8550	0	0	1
162400	078260	4350	1	1	1
162400	078260	4950	1	1	1
162400	078260	5550	1	1	1
162400	078260	6150	1	1	1
162400	078260	6750	1	1	1
162400	078260	7350	1	1	1
162400	078260	7950	1	1	1
162400	078260	8550	1	1	1
162400	078260	4350	0	1	1
162400	078260	4950	0	1	1
162400	078260	5550	0	1	1
162400	078260	6150	0	1	1
162400	078260	6750	0	1	1
162400	078260	7350	0	1	1
162400	078260	7950	0	1	1
162400	078260	8550	0	1	1
195570	078260	4350	1	1	1
195570	078260	4950	1	1	1
195570	078260	5550	1	1	1
195570	078260	6150	1	1	1
195570	078260	6750	1	1	1
195570	078260	7350	1	1	1
195570	078260	7950	1	1	1
195570	078260	8550	1	1	1
195570	078260	4350	0	1	1
195570	078260	4950	0	1	1
195570	078260	5550	0	1	1
195570	078260	6150	0	1	1
195570	078260	6750	0	1	1
195570	078260	7350	0	1	1
195570	078260	7950	0	1	1
195570	078260	8550	0	1	1
096060	104800	4350	1	0	1
096060	104800	4950	1	0	1
096060	104800	5550	1	0	1
096060	104800	6150	1	0	1
096060	104800	6750	1	0	1
096060	104800	7350	1	0	1
096060	104800	7950	1	0	1
096060	104800	8550	1	0	1
096060	104800	4350	0	0	1
096060	104800	4950	0	0	1
096060	104800	5550	0	0	1
096060	104800	6150	0	0	1
096060	104800	6750	0	0	1
096060	104800	7350	0	0	1
096060	104800	7950	0	0	1
096060	104800	8550	0	0	1
129230	104800	4350	1	0	1
129230	104800	4950	1	0	1
129230	104800	5550	1	0	1
129230	104800	6150	1	0	1
129230	104800	6750	1	0	1
129230	104800	7350	1	0	1
129230	104800	7950	1	0	1
129230	104800	8550	1	0	1
129230	104800	4350	0	0	1
129230	104800	4950	0	0	1
129230	104800	5550	0	0	1
129230	104800	6150	0	0	1
129230	104800	6750	0	0	1
129230	104800	7350	0	0	1
129230	104800	7950	0	0	1
129230	104800	8550	0	0	1
162400	104800	4350	1	1	1
162400	104800	4950	1	1	1
162400	104800	5550	1	1	1
162400	104800	6150	1	1	1
162400	104800	6750	1	1	1
162400	104800	7350	1	1	1
162400	104800	7950	1	1	1
162400	104800	8550	1	1	1
162400	104800	4350	0	1	1
162400	104800	4950	0	1	1
162400	104800	5550	0	1	1
162400	104800	6150	0	1	1
162400	104800	6750	0	1	1
162400	104800	7350	0	1	1
162400	104800	7950	0	1	1
162400	104800	8550	0	1	1
195570	104800	4350	1	1	1
195570	104800	4950	1	1	1
195570	104800	5550	1	1	1
195570	104800	6150	1	1	1
195570	104800	6750	1	1	1
195570	104800	7350	1	1	1
195570	104800	7950	1	1	1
195570	104800	8550	1	1	1
195570	104800	4350	0	1	1
195570	104800	4950	0	1	1
195570	104800	5550	0	1	1
195570	104800	6150	0	1	1
195570	104800	6750	0	1	1
195570	104800	7350	0	1	1
195570	104800	7950	0	1	1
195570	104800	8550	0	1	1
096060	131340	4350	1	0	1
096060	131340	4950	1	0	1
096060	131340	5550	1	0	1
096060	131340	6150	1	0	1
096060	131340	6750	1	0	1
096060	131340	7350	1	0	1
096060	131340	7950	1	0	1
096060	131340	8550	1	0	1
096060	131340	4350	0	0	1
096060	131340	4950	0	0	1
096060	131340	5550	0	0	1
096060	131340	6150	0	0	1
096060	131340	6750	0	0	1
096060	131340	7350	0	0	1
096060	131340	7950	0	0	1
096060	131340	8550	0	0	1
129230	131340	4350	1	0	1
129230	131340	4950	1	0	1
129230	131340	5550	1	0	1
129230	131340	6150	1	0	1
129230	131340	6750	1	0	1
129230	131340	7350	1	0	1
129230	131340	7950	1	0	1
129230	131340	8550	1	0	1
129230	131340	4350	0	0	1
129230	131340	4950	0	0	1
129230	131340	5550	0	0	1
129230	131340	6150	0	0	1
129230	131340	6750	0	0	1
129230	131340	7350	0	0	1
129230	131340	7950	0	0	1
129230	131340	8550	0	0	1
162400	131340	4350	1	1	1
162400	131340	4950	1	1	1
162400	131340	5550	1	1	1
162400	131340	6150	1	1	1
162400	131340	6750	1	1	1
162400	131340	7350	1	1	1
162400	131340	7950	1	1	1
162400	131340	8550	1	1	1
162400	131340	4350	0	1	1
162400	131340	4950	0	1	1
162400	131340	5550	0	1	1
162400	131340	6150	0	1	1
162400	131340	6750	0	1	1
162400	131340	7350	0	1	1
162400	131340	7950	0	1	1
162400	131340	8550	0	1	1
195570	131340	4350	1	1	1
195570	131340	4950	1	1	1
195570	131340	5550	1	1	1
195570	131340	6150	1	1	1
195570	131340	6750	1	1	1
195570	131340	7350	1	1	1
195570	131340	7950	1	1	1
195570	131340	8550	1	1	1
195570	131340	4350	0	1	1
195570	131340	4950	0	1	1
195570	131340	5550	0	1	1
195570	131340	6150	0	1	1
195570	131340	6750	0	1	1
195570	131340	7350	0	1	1
195570	131340	7950	0	1	1
195570	131340	8550	0	1	1
096060	157880	4350	1	0	1
096060	157880	4950	1	0	1
096060	157880	5550	1	0	1
096060	157880	6150	1	0	1
096060	157880	6750	1	0	1
096060	157880	7350	1	0	1
096060	157880	7950	1	0	1
096060	157880	8550	1	0	1
096060	157880	4350	0	0	1
096060	157880	4950	0	0	1
096060	157880	5550	0	0	1
096060	157880	6150	0	0	1
096060	157880	6750	0	0	1
096060	157880	7350	0	0	1
096060	157880	7950	0	0	1
096060	157880	8550	0	0	1
129230	157880	4350	1	0	1
129230	157880	4950	1	0	1
129230	157880	5550	1	0	1
129230	157880	6150	1	0	1
129230	157880	6750	1	0	1
129230	157880	7350	1	0	1
129230	157880	7950	1	0	1
129230	157880	8550	1	0	1
129230	157880	4350	0	0	1
129230	157880	4950	0	0	1
129230	157880	5550	0	0	1
129230	157880	6150	0	0	1
129230	157880	6750	0	0	1
129230	157880	7350	0	0	1
129230	157880	7950	0	0	1
129230	157880	8550	0	0	1
162400	157880	4350	1	1	1
162400	157880	4950	1	1	1
162400	157880	5550	1	1	1
162400	157880	6150	1	1	1
162400	157880	6750	1	1	1
162400	157880	7350	1	1	1
162400	157880	7950	1	1	1
162400	157880	8550	1	1	1
162400	157880	4350	0	1	1
162400	157880	4950	0	1	1
162400	157880	5550	0	1	1
162400	157880	6150	0	1	1
162400	157880	6750	0	1	1
162400	157880	7350	0	1	1
162400	157880	7950	0	1	1
162400	157880	8550	0	1	1
195570	157880	4350	1	1	1
195570	157880	4950	1	1	1
195570	157880	5550	1	1	1
195570	157880	6150	1	1	1
195570	157880	6750	1	1	1
195570	157880	7350	1	1	1
195570	157880	7950	1	1	1
195570	157880	8550	1	1	1
195570	157880	4350	0	1	1
195570	157880	4950	0	1	1
195570	157880	5550	0	1	1
195570	157880	6150	0	1	1
195570	157880	6750	0	1	1
195570	157880	7350	0	1	1
195570	157880	7950	0	1	1
195570	157880	8550	0	1	1
096060	184420	4350	1	0	1
096060	184420	4950	1	0	1
096060	184420	5550	1	0	1
096060	184420	6150	1	0	1
096060	184420	6750	1	0	1
096060	184420	7350	1	0	1
096060	184420	7950	1	0	1
096060	184420	8550	1	0	1
096060	184420	4350	0	0	1
096060	184420	4950	0	0	1
096060	184420	5550	0	0	1
096060	184420	6150	0	0	1
096060	184420	6750	0	0	1
096060	184420	7350	0	0	1
096060	184420	7950	0	0	1
096060	184420	8550	0	0	1
129230	184420	4350	1	0	1
129230	184420	4950	1	0	1
129230	184420	5550	1	0	1
129230	184420	6150	1	0	1
129230	184420	6750	1	0	1
129230	184420	7350	1	0	1
129230	184420	7950	1	0	1
129230	184420	8550	1	0	1
129230	184420	4350	0	0	1
129230	184420	4950	0	0	1
129230	184420	5550	0	0	1
129230	184420	6150	0	0	1
129230	184420	6750	0	0	1
129230	184420	7350	0	0	1
129230	184420	7950	0	0	1
129230	184420	8550	0	0	1
162400	184420	4350	1	1	1
162400	184420	4950	1	1	1
162400	184420	5550	1	1	1
162400	184420	6150	1	1	1
162400	184420	6750	1	1	1
162400	184420	7350	1	1	1
162400	184420	7950	1	1	1
162400	184420	8550	1	1	1
162400	184420	4350	0	1	1
162400	184420	4950	0	1	1
162400	184420	5550	0	1	1
162400	184420	6150	0	1	1
162400	184420	6750	0	1	1
162400	184420	7350	0	1	1
162400	184420	7950	0	1	1
162400	184420	8550	0	1	1
195570	184420	4350	1	1	1
195570	184420	4950	1	1	1
195570	184420	5550	1	1	1
195570	184420	6150	1	1	1
195570	184420	6750	1	1	1
195570	184420	7350	1	1	1
195570	184420	7950	1	1	1
195570	184420	8550	1	1	1
195570	184420	4350	0	1	1
195570	184420	4950	0	1	1
195570	184420	5550	0	1	1
195570	184420	6150	0	1	1
195570	184420	6750	0	1	1
195570	184420	7350	0	1	1
195570	184420	7950	0	1	1
195570	184420	8550	0	1	1
096060	210960	4350	1	0	1
096060	210960	4950	1	0	1
096060	210960	5550	1	0	1
096060	210960	6150	1	0	1
096060	210960	6750	1	0	1
096060	210960	7350	1	0	1
096060	210960	7950	1	0	1
096060	210960	8550	1	0	1
096060	210960	4350	0	0	1
096060	210960	4950	0	0	1
096060	210960	5550	0	0	1
096060	210960	6150	0	0	1
096060	210960	6750	0	0	1
096060	210960	7350	0	0	1
096060	210960	7950	0	0	1
096060	210960	8550	0	0	1
129230	210960	4350	1	0	1
129230	210960	4950	1	0	1
129230	210960	5550	1	0	1
129230	210960	6150	1	0	1
129230	210960	6750	1	0	1
129230	210960	7350	1	0	1
129230	210960	7950	1	0	1
129230	210960	8550	1	0	1
129230	210960	4350	0	0	1
129230	210960	4950	0	0	1
129230	210960	5550	0	0	1
129230	210960	6150	0	0	1
129230	210960	6750	0	0	1
129230	210960	7350	0	0	1
129230	210960	7950	0	0	1
129230	210960	8550	0	0	1
162400	210960	4350	1	1	1
162400	210960	4950	1	1	1
162400	210960	5550	1	1	1
162400	210960	6150	1	1	1
162400	210960	6750	1	1	1
162400	210960	7350	1	1	1
162400	210960	7950	1	1	1
162400	210960	8550	1	1	1
162400	210960	4350	0	1	1
162400	210960	4950	0	1	1
162400	210960	5550	0	1	1
162400	210960	6150	0	1	1
162400	210960	6750	0	1	1
162400	210960	7350	0	1	1
162400	210960	7950	0	1	1
162400	210960	8550	0	1	1
195570	210960	4350	1	1	1
195570	210960	4950	1	1	1
195570	210960	5550	1	1	1
195570	210960	6150	1	1	1
195570	210960	6750	1	1	1
195570	210960	7350	1	1	1
195570	210960	7950	1	1	1
195570	210960	8550	1	1	1
195570	210960	4350	0	1	1
195570	210960	4950	0	1	1
195570	210960	5550	0	1	1
195570	210960	6150	0	1	1
195570	210960	6750	0	1	1
195570	210960	7350	0	1	1
195570	210960	7950	0	1	1
195570	210960	8550	0	1	1